Project information
Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
- Project Identification
- GA202/98/0988
- Project Period
- 1/1998 - 1/2000
- Investor / Pogramme / Project type
-
Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
- Cooperating Organization
-
Institute of Scientific Instruments of the ASCR, v. v. i.
- Responsible person RNDr. Pavel Pokorný
- Responsible person prof. RNDr. Miloslav Ohlídal, CSc.
Within both perturbation and diffraction theories new theoretical approaches enabling us to express optical quantities of multilayer systems with randomly rough boundaries will be formulated. These quantities will be connected with coherently and incoher ently scattered light. The theoretical results will be compared with experimental results achieved for chosen rough multilayer systems. Analytical methods allowing a determination of the optical and statistical parameters of the systems mentioned will be developed. Moreover, a comparison of the new theoretical approach developed within the perturbation theory with approaches employed in the X-ray region will be carried out. Possibilities concerning an extension of this optical approach to the X-ray regi on will also be investigated. A combination of optical and X-ray methods will be used for analyzing various thin film systems.
Publications
Total number of publications: 34
1999
-
Měření drsnosti povrchu ve strojírenství vybranými metodami koherenční optiky
Jemná mechanika a optika, year: 1999, volume: 44, edition: 9
-
Optical characterization of multilayer systems with randomly rough boundaries
18th Congress of the International Commision for Optics: Optics for the Next Millennium, year: 1999
-
Optical methods for surface characterization
11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, year: 1999
-
Optical quantities of multilayer systems with correlated randomly rough boundaries
Journal of modern optics, year: 1999, volume: 46, edition: 14
-
Relationship Between AFM and Optical Measurements at Analyzing Surface Roughness
Jemná mechanika a optika, year: 1999, volume: 44, edition: 10
-
Úplná optická charakterizace neabsorbujících dvojvrstev a trojvrstev pomocí víceúhlové elipsometrie
Jemná mechanika a optika, year: 1999, volume: 1999, edition: 2
1998
-
Analysis of thin films with slightly rough boundaries
Mikrochim. Acta, year: 1998, volume: Suppl. 15, edition: 1
-
Comparison of AFM and optical methods at measuring nanometric surface roughness
Proceedings of the 3th Seminar on Quantitative Microscopy, year: 1998
-
Ellipsometric parameters and reflectances of thin films with slightly rough boundaries
Journal of modern optics, year: 1998, volume: 45, edition: 5
-
Ellipsometry of thin films
Acta Physica Slovaca, year: 1998, volume: 48, edition: 4